Temperature Control Equipment
| Refrigerated Thermo-cooler HRG |
|
| Economy type chiler (Three-phase power supply) |
|
Series/
CAD | Set
temperature
range | Cooling
capacity | Temperature
stability | Cooling
method | Circulating liquid |
HRG  | 5 to 35ºC | 1 to 15 kW | ±1.0 ºC/
±0.5 ºC | Air-cooled
refrigeration/
Water-cooled
refrigeration | Clear water,
Deionized water,
Ethylene glycol
aqueous solution |
| Features |
- Air-cooled models provide cooling water wherever needed thanks to easy mounting and easy operation.
- Proven performance with a wide range of applications such as lasers/analysis equipment/LCD manufacturing equipment/mold temperature regulators, etc.
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|
| Refrigerated Thermo-cooler HRGC |
|
| Economy type chiler (Single phase power supply) |
|
Series/
CAD | Set
temperature
range | Cooling
capacity | Temperature
stability | Cooling
method | Circulating liquid |
| HRGC | 5 to 35 ºC | 1 to 5 kW | ±1.0 ºC/
±0.5 ºC | Air-cooled
refrigeration/
Water-cooled
refrigeration | Clear water,
Deionized water,
Ethylene glycol
aqueous solution |
| Features |
- Air-cooled models provide cooling water wherever needed thanks to easy mounting and easy operation.
- Proven performance with a wide range of applications such as mold temperature regulators/lasers/analysis equipment/LCD manufacturing equipment, etc.
- Ideal for overseas models (single-phase 200 to 230 V)
- Conforms to UL specifications, CE marking.
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|
| Refrigerated Thermo-chiller HRZ |
|
| High-performance chiller |
|
Series/
CAD | Set
temperature
range | Cooling
capacity | Temperature
stability | Cooling
method | Circulating liquid |
| HRZ | -20 to 40 ºC | 1 to 15 kW | ±0.1 ºC | Water-cooled
refrigeration | Fluorinated liquid,
Clear water,
Deionized water,
Ethylene glycol
aqueous solution |
| 20 to 90 ºC |
| -20 to 90 ºC |
| Features |
- Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal.
- All models conform to safety standards.
- Conforms to UL and SEMI specifications, CE marking.
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|
| Refrigerated Thermo-chiller HRZ |
|
| High-performance chiller (Built-in inverter) |
|
Series/
CAD | Set
temperature
range | Cooling
capacity | Temperature
stability | Cooling
method | Circulating liquid |
| HRZ | -20 to 90 ºC | 1.8 to 10 kW | ±0.1 ºC | Water-cooled
refrigeration | Fluorinated liquid,
Clear water,
Deionized water,
Ethylene glycol
aqueous solution |
| Features |
- In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
- Wide temperature range and cooling capacity range covered by one unit
- Suited to the short innovation cycle of semiconductor equipment, and capable of responding flexibly to changes in the process conditions.
- Conforms to UL and SEMI specifications, CE marking.
|
|
| Water-cooled Thermo-chiller HRW |
|
| High-performance chiller (Water-cooled type) |
|
Series/
CAD | Set
temperature
range | Cooling
capacity | Temperature
stability | Cooling
method | Circulating liquid |
| HRW | 20 to 90 ºC | 2 to 30 kW | ±0.3 ºC | Water-cooled
refrigeration | Fluorinated liquid,
Clear water,
Deionized water,
Ethylene glycol
aqueous solution |
| Features |
- Direct heat exchanger for water circulated within a plant
- For temperature regulation within the temperature range where no freezer is needed
- Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal.
- Conforms to UL and SEMI specifications, CE marking.
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|
| Peltier-Type Thermo-con HEC |
|
| High-precision chiller |
|
Series/
CAD | Set
temperature
range | Cooling
capacity | Temperature
stability | Cooling
method | Circulating liquid |
| HEC | 10 to 60 ºC | 230 W | ±0.01 to
0.03 ºC | Peltier-type
air cooled | Clear water |
140, 320,
600, 1200 W | ±0.01 to
0.03 ºC | Peltier-type
water cooled | Clear water,
Fluorinated
aqueous liquid |
| Features |
- For applications requiring high-precision temperature control
- High-precision, refrigerant-free temperature control equipment employing Peltier elements
- Simple structure and high reliability
- Can easily be built into equipments with compact and low-vibration design
- Compatible with wide range of power supply voltages
- Conforms to UL specifications, CE marking.
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|
| Peltier-Type Thermoelectric Bath HEB |
|
| High-precision thermoelectric bath |
|
Series/
CAD | Set
temperature
range | Cooling
capacity | Temperature
stability | Cooling
method | Circulating liquid |
| HEB | -15 to 60 ºC | 140 W | ±0.1 ºC | Peltier-type
water cooled | Clear water,
Fluorinated
aqueous liquid |
| Features |
- High-precision temperature-regulation thermostatic chamber that employs Peltier elements
- Compact and low vibration
- Unique agitation method keeps up-down temperature distribution to a minimum.
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|
| Peltier-Type Chemical Thermo-con HED |
|
| Fluoropolymer temperature control equipment for chemicals |
|
Series/
CAD | Set
temperature
range | Cooling
capacity | Temperature
stability | Cooling
method | Circulating liquid |
| HED | 10 to 60 ºC | 300 to 750 W | ±0.1 ºC | Peltier air
cooling | Deionized water,
Chemicals |
| Features |
- Heat exchanger employs Peltier elements for direct temperature control of chemicals
- Fluoropolymer heat exchanger is suitable for a wide range of chemicals.
- Conforms to UL specifications, CE marking.
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|
| Peltier-Type Air-Thermo HEA |
|
|
|
Series/
CAD | Set
temperature
range | Cooling
capacity | Temperature
stability | Cooling
method | Circulating liquid |
| HEA | 0 to 50 ºC | 22 W | ±0.1 ºC | Peltier air
cooling | Air |
| Features |
- High precision, compact temperature control equipment using Peltier elements.
- Compatible with localized and small-volume temperature control.
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