HYDRO-TEK

High Vacuum Equipment

Aluminum High Vacuum Angle Valve   XLx
	Series/CAD Actuation Shaft seal system Valve type Material Flange size XLA  Air operated Bellows seal Single acting (N.C.) Body: Aluminum alloy Bellows: Stainless steel 316L 16 to 80 XLAV (With solenoid valve)  XLC  Double acting XLCV (With solenoid valve)  XLF  O-ring seal Single acting (N.C.) Body: Aluminum alloy 16 to 160 XLFV (With solenoid valve)  XLG  Double acting 16 to 80 XLGV (With solenoid valve)  XLD  Bellows/ O-ring seal Single acting (N.C.) Body: Aluminum alloy Bellows: Stainless steel 316L 25 to 80 XLDV (With solenoid valve)  XLH  Manual Bellows seal Manual Body: Aluminum alloy Bellows: Stainless steel 316L 16 to 50 XLS  Electromagnetic Pressure balanced bellow seal Single acting (N.C.) 16, 25 Features Strong against fluorine Minimal gas emissions Minimal heavy metal contamination

Aluminum One-touch Connection and Release High Vacuum Angle Valve   XLAQ/XLDQ
	Series/CAD Actuation Shaft seal system Valve type Material Flange size XLAQ  Air operated Bellows seal Single acting (N.C.) Body: Aluminum Bellows: Stainless steel 316L 16 to 50 XLDQ  Bellows seal O-ring seal 40,50 Features One-touch connection and release (no tool)

Stainless Steel High Vacuum Angle/In-line Valve   XM/XY
Note) Size 16 is not available for In-line type.	Series/CAD (Angle/In-line) Actuation Shaft seal system Valve type Material Flange size XMA/XYA  Air operated Bellows seal Single acting (N.C.) Body: SCS13 (equivalent to stainless steel 304) Bellows: Stainless steel 316L 16 to 80 Note) XMC/XYC  Double acting XMD/XYD  Bellows/ O-ring seal Single acting (N.C.) Body: SCS13 (equivalent to stainless steel 304) Bellows: Stainless steel 316L 25 to 80 XMH/XYH  Manual Bellows seal Manual Body: SCS13 (equivalent to stainless steel 304) Bellows: Stainless steel 316L 16 to 50 Note) Features All-in-one integrated structure with high-precision casting, no gas buildup Mounting interchangeable with Aluminum High Vacuum Angle Valve Series XL (Series XM)

Auto Switch   D
	Series Type Features D Series  Reed auto switch General purpose Solid state auto switch General purpose

Smooth Vent Valve   XVD
	Series/CAD Valve type Fluid Piping Port size XVD  Normally closed (Open when pressured, Spring seal) Nitrogen, Air, Inert gas, etc. VCR® Swagelok® 1/4B Features With the valve and needle valve all in one unit, takes up 1/4 the space of conventional models Major reduction in particles through the use of a metal diaphragm in the sheet portion The flow rate of both initial air supply and main air supply can be adjusted.

Slit Valve   XGT
	Series/CAD Operating pressure range (Pa) Fluid Gate size (Height x Width) (mm) Operating pressure (MPa) XGT  Atmospheric pressure to 1x10-6 Inert gas type vacuum 32 x 222 46 x 236 50 x 336 0.45 to 0.6 Features Suitable for use as a block disk between the load lock chamber and transfer chamber, or the transfer chamber and process chamber, of semiconductor equipment

Rodless Cylinder for Vacuum   CYV
	Series/CAD Operating environment pressure [Pa (ABS)] Bore size (mm) CYV  Atmosphere to 1.3x10-4 15,32 Features Air cylinder for transfer in vacuum environments (1.3x10-4 Pa)