Type | Series/CAD | Operating pressure | Filtration |
Cartridge type
disc | SFA100/200/300 | Max.1.0 MPa
(Vacuum: 1.3 x 10-6 kPa) | 0.01 μm
(Filtration efficiency
99.99%) |
Cartridge type
straight | SFB100 | Max.1.0 MPa
(Vacuum: 1.3 x 10-6 kPa) |
| Features |
- Cartridge type allows element replacement.
|
Disposable type
straight | SFB300 | Max.15 MPa
(Vacuum: 1.3 x 10-6 kPa) | 0.01 μm
(Filtration efficiency
99.99%) |
Disposable type
multiple disc | SFC100 | Max.1.8 MPa
(Vacuum: 1.3 x 10-6 kPa) |
| Features |
- Compact disposable type for semiconductor industry
|