Flow Switches





2-Color Display Digital Flow Switch   PFM
Series/CADSet flow range (L/min)
PFM 0.2 to 10 (0.2 to 5)
0.5 to 25 (0.5 to 12.5)
1 to 50 (1 to 25)
2 to 100 (2 to 50)      ( ): For CO2
Features
  • Air, N2, Ar, CO2
  • Grease-free
  • Integrated flow adjustment valve
  • Compact, Lightweight, Space-saving

Flow Sensor   PFMV
Series/CADSet flow range (L/min)
PFMV 0 to 0.5
0 to 1
0 to 3
-0.5 to 0.5
-1 to 1
-3 to 3
Features
  • Adsorption confirmation of minute workpieces
  • Repeatability: ± 2% F.S. or less
  • Response speed: 5 ms or less, withstand pressure: 500 kPa
  • Grease-free, RoHS compatible
  • Covers total range with one voltage monitor

Digital Flow Switch for Air   PF2A
Series/CADSet flow range (L/min)
PF2A 1 to 10
5 to 50
10 to 100
20 to 200
50 to 500
150 to 3000
300 to 6000
600 to 12000
Features
  • Integrated type and separate monitor type are available.
  • Switch output, accumulated pulse output, analog output
  • Capable of switching back and forth between cumulative and instantaneous flow
  • IP65

Digital Flow Switch for Water   PF2W
Series/CADSet flow range (L/min)
PF2W 0.5 to 4
2 to 16
5 to 40
10 to 100
Features
  • Integrated type and Separate monitor type are available.
  • Switch output, Accumulated pulse output, Analog output
  • Capable of switching back and forth between cumulative and instantaneous flow
  • Capable of operating at temperatures as high as 90 ºC (PF2WxT)
  • IP65

Digital Flow Switch for Deionized Water and Chemicals   PF2D
Series/CADSet flow range (L/min)
PF2D 0.4 to 4
1.8 to 20
4.0 to 40
Features
  • Body sensor: New PFA, Tube: Super PFA
  • Low-particle generation, Excellent flow-through characteristics

4-Channel Flow Monitor   PF2x200
Series/CADApplicable sensorSet flow range (L/min)
PF2A200/201 For airPF2A50.5 to 10.5
2.5 to 52.5
5 to 105
10 to 210
25 to 525
PF2W200/201 For waterPF2W50.35 to 4.50
1.7 to 17.0
3.5 to 45.0
7 to 110
PF2D200/201 For pure water/
chemicals
PF2D50.25 to 4.50
1.3 to 21.0
2.5 to 45.0
Features
  • One controller can handle four units' worth of flow volume maintenance.
  • Four different flow ranges can be connected to one controller.

Diaphragm Style Flow Switch   IFW5
Series/CADSet flow range (L/min)
IFW5 1 to 10
10 to 20
20 to 50
Features
  • Used as a general relaying device when water stoppage or water volume reduction occurs during the use of a cooling water system, etc.
  • With neon light.

Paddle Style Flow Switch   IF3
Series/CADSet flow range (L/min)
IF3 14 to 60
20 to 1500
36 to 2600
Features
  • Used as a general relaying device when water stoppage or water volume reduction occurs during the use of a cooling water system, etc.
  • Port size 3/4, 1
  • Equivalent to IP42 and IP44.




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flow.htm